Multi-layer SU-8 mold
This custom mold allows you to produce your own microfluidic chips easily. Multilayer SU-8 resin microstructures can be manufactured on a Silicon wafer in order to get master Molds with high precision and resolution. You can choose from 1 to 4 layer options
Multi-layer SU-8 mold
This custom SU-8 master mold is perfect for your lab production of microfluidic chips. A cost-effective and useful tool for soft casting polymers (like PDMS) as well as hot-embossing processes (COC, PMMA, flexdym...).
Up to 4 SU-8 layers can be patterned with high aspect ratio en solicon substrates:
Microstructure layout should be provided by customers in an appropriate file format (.CIF) or they can be adapted to a correct format by our partner. After the revision of the layout , previously to the manufacturing, a pdf file will be provided to customer for the final approval of the design. The main aspectsto be considered in the design of the microstructures:
- File format: CIF files. Other formats as DXF may be accepted. All the structures should have closed contours. Any adaptation of the provided file will bring an extra charge.
- Effective area. Layout must be fixed on 90 mm diameter of the wafer.
- Dicing. The cutting lines should be drawn in case they are needed.
- Multi-layer Molds. Alignment marks should be provided for the different layers
- Mold dimensions: 4 inch wafers (~100 mm). The effective area for the structures in the Mold is 90 mm Ø.
- Substrate material: Silicon (other substrates such as glass or polymers, may be available on demand)
- Structures material: SU-8 resin
- Structures layers: Up to 4 layers
- Typical aspect ratio: 1:3 (Width:Height). Other aspect ratio available on demand.
- Minimal features: Height: 15 μm / Width: 10 μm
- Tolerance: Height: <10%/ Width: <2 μm
- Silicon wafer could be cut on smaller rectuganlar pieces in order to get individual masters. Other technical features can be fulfilled on request.
The following services are available on demand:
- Dicing in smaller pieces
- Design (non CIF files)
- Express work (2 weeks)
- Design change after mask approval
- Microstructures width <10 µm
Master molds for the microfabrication of customized microfluidic chips, MEMS, MOEMS and general soft lithography.