Multi-layer SU-8 mold

Master mold

Multi-layer SU-8 mold



Category: Master molds, Microfabrication

This custom mold allows you to produce your own microfluidic chips easily.  Multilayer SU-8 resin microstructures can be manufactured on a Silicon wafer in order to get master Molds with high precision and resolution. You can choose from 1 to 4 layer options

On Demand

Our specialized microfluidics team will gladly help you define your needs
This custom mold allows you to produce your own microfluidic chips easily.  Multilayer SU-8 resin microstructures can be manufactured on a Silicon wafer in order to get master Molds with high precision and resolution. You can choose from 1 to 4 layer options

Multi-layer SU-8 mold

This custom SU-8 master mold is perfect for your lab production of microfluidic chips. A cost-effective and useful tool for soft casting polymers (like PDMS) as well as hot-embossing processes (COC, PMMA, flexdym...).

 

Up to 4 SU-8 layers can be patterned with high aspect ratio en solicon substrates:

Microstructure layout

Microstructure layout should be provided by customers in an appropriate file format (.CIF) or they can be adapted to a correct format by our partner. After the revision of the layout , previously to the manufacturing, a pdf file will be provided to customer for the final approval of the design. The main aspectsto be considered in the design of the microstructures:

 

  • File format: CIF files. Other formats as DXF may be accepted. All the structures should have closed contours. Any adaptation of the provided file will bring an extra charge.
  • Effective area. Layout must be fixed on 90 mm diameter of the wafer.
  • Dicing. The cutting lines should be drawn in case they are needed.
  • Multi-layer Molds. Alignment marks should be provided for the different layers

    Characteristics

    • Mold dimensions: 4 inch wafers (~100 mm). The effective area for the structures in the Mold is 90 mm Ø.
    • Substrate material: Silicon (other substrates such as glass or polymers, may be available on demand)
    • Structures material: SU-8 resin
    • Structures layers: Up to 4 layers
    • Typical aspect ratio: 1:3 (Width:Height). Other aspect ratio available on demand.
    • Minimal features: Height: 15 μm / Width: 10 μm
    • Tolerance: Height: <10%/ Width: <2 μm
    • Silicon wafer could be cut on smaller rectuganlar pieces in order to get individual masters. Other technical features can be fulfilled on request

     

    The following services are available on demand: 

     

    • Dicing in smaller pieces 
    • Design (non CIF files) 
    • Express work (2 weeks) 
    • Design change after mask approval
    • Microstructures width <10 µm

     

    Applications

    Master molds for the microfabrication of customized microfluidic chips, MEMS, MOEMS and general soft lithography.


    Microfluidics contact team

    Contact our team:

    contact@darwin-microfluidics.com


    Our specialized team is at your service to help you pick the product best suited to your needs. We also offer specific quotes for high quantity, specific, or custom orders. Feel free to ask, that's what we're for!