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SQ Negative Epoxy Photoresist for Microfluidics

SQ™ is a negative tone epoxy photoresist specifically formulated for microfluidics and PDMS molding. Sensitive to Near-UV, i-line and broadband wavelengths, it is a great alternative to SU8.
SQ™ uses superior epoxies, now adapted to microfluidics, with improved optical transparency, particles and filter-ability, and lot-to-lot consistency. This makes SQ™ outperform standard SU-8 when it comes to soft-lithography.
Film thickness from 2 to 100 µm in a single coating, up to 200 µm with a double coating.
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General

SQ superior photoresist for microfluidics

SQ has been developped with superior specifications to address applications as demanding as microelectronics. This SQ for microfluidics inherits from this development and shows outstanding performances when used for soft-lithography.

SQ for Microfluidics offers the following advantages:

  • Superior cleanliness
  • Excellent reproducibility
  • Improved consistent surface energy for soft-lithography in Microfluidics
  • Thourough Quality Control
  • Better lot-to-lot consistency
  • Fully compatible with SU-8 processes

5 types are available, for typical thicknesses as follows:

  • SQ-2 for around 1 to 4 µm
  • SQ-5 for around 3 to 11 µm
  • SQ-10 for around 8 to 22 µm
  • SQ-25 for around 11 to 48 µm
  • SQ-50 for around 25 to 100 µm

Easy to switch from SU-8 epoxy photoresists

When switching to SQ, you won't have to modify your workflow: SQ shares the same protocol (see the Protocol tab). 
While we advise you to use SQ Developer, a premium grade chemical, you can also use your usual SU-8 developer, or standard PGMEA. 

Just like SU-8, SQ is available in different types (SQ-2 to SQ-50) depending on the aimed thickness, and in various packaging (from 100 mL to 4 x 4 L), always at a very affordable price!

 

5 reasons to switch from SU-8 to SQ

PLUG-N-PLAY

SQ™ is fully compatible with established SU-8 lithographic processes. Pull out SU-8 negative epoxy and plug in KemLab SQ™.

LOWER PRICING

SQ™ is designed to be competitive in the market with prices that beat the competition. Better quality for less cost.

SUPERIOR RAW MATERIALS

Start with better materials, make a better product. SQ™ uses a superior quality resin specially designed for the microelectronics industry. This superior resin manufacturing process produces a cleaner, more consistent negative epoxy photoresist with fewer particles, more transparency, and fewer microbubbles.

BETTER OPTICAL TRANSPARENCY

SQ™ resin material is visually cleaner, less yellow and more transparent resulting in improved transmission and resistance to oxidative yellowing versus SU-8.

APPLICATION-FOCUSED QUALITY CONTROL

Value-added testing was identified and implemented to benefit specific microfluidic and optical industry requirements.

 

Kemlab Hare SQ for Microfluidics Datasheet

PDF Datasheet

Kemlab Hare SQ SDS

Safety DataSheet

Specifications
General Properties
Tone Negative
Max Single Coat Thickness, µm   100
Aspect Ratio   10:1
Storage Condition / Shelf Life  15-30°C / 1 yr
Mechanical Properties
Softening Point / Tg 210°C
Young’s Modulus 2.0 GPa
Coeff. of Thermal Expansion, CTE 52 ppm/°C
Tensile Strength 60 MPa
Thermal Conductivity 0.2 – 0.3 W/m·K
Thermal Stability 315°C
Electrical Properties
Dielectric Constant (relative), 1 GHz, 50% RH 4.0
Dielectric Loss, 1 GHz ~0.02
Dielectric Strength (V/µm) 112
Volume Resistivity (Ω·cm) ~2.5 x 1016
Protocol

SUBSTRATE PREPARATION

SQ™ adheres to variety of substrates; including silicon, gold, aluminum, chromium, and copper. For maximum adhesion, substrates should be clean and dry prior to applying SQ™ photoresist.

SPINCOATING

Film thickness is targeted using the spin speed curves shown below. The coat program uses a 5 - 10 second spread cycle. Spin time at final speed is 30 seconds.

SQ Spin Speed vs. Film Thickness

Kemlab Hare SQ Spin Curve Film Thickness Kemlab Hare SQ Spin curve Film Thickness

SOFTBAKE

The recommended softbake for the SQ™ utilizes a two-step bake on a contact hot plate in order to minimize film stress and adhesion issues. See the table below for details.

EXPOSURE

SQ™ is designed for near UV (300-400nm) exposure wavelengths. Exposure dose will vary depending on the exposure tool set, film thickness, and process conditions. Nominal exposure doses are shown in the table below. If you know the typical lamp surface power density of your illumination device, you can use our dedicated calculator to get personalized exposure times.

POST-EXPOSURE BAKE (PEB)

Recommended PEB time is adjusted according to film thickness in order to ensure sufficient crosslinking of the resist film. A two-step PEB is recommended to reduce film stress which can lead to cracking and/or adhesion loss. See the table below for details.

DEVELOPMENT

SQ™ is designed for use with KemLab SQ™ Developer. SU-8 Developer and PGMEA can be used but with no guarantee on the optimal performances of the resist. SQ™ can be developed using immersion, puddle or spray puddle. Thicker films benefit from refreshing developer during the develop step; such as with a double puddle. Rinse developer off substrate with isopropyl alcohol (IPA) and dry. See the table below for recommended development time.

HARDBAKE

SQ™ can be hardbaked for permanent applications that would benefit from further crosslinking.
Bake at > 120°C for at least 5 minutes (hot plate). A short hardbake can fuse cracks caused by film stress. For permanent structures, temperatures above 150°C are recommended: oven bake will increase crosslinking with minimal increase in stress.

Kemlab Hare SQ workflow table

*Exposure time is given by the ratio of the given Exposure Dose value and the power density of your illumination device.
For instance, for a source with 35 mW/cm² power density, exposure time for a 2 µm thick film is 200/35 =  5.7 s.

FAQ

How is SQ different than SU-8?
SQ is a direct substitute for most applications. The epoxy resin used in SQ is originally designed and manufactured for the microelectronics industry; ensuring superior cleanliness and lot-to-lot reproducibility.

Which exposure wavelenght should I use?
SQ™ is designed for near UV (300-400nm) exposure wavelengths, including the commonly used i-line (365 nm). Nominal exposure doses are shown  for broadband exposure with a 360 nm cutoff filter.

How should I store SQ negative epoxy?

The SQ resist series shows excellent resistance to temperature extremes in terms of performance and shelf life. It is recommended however that for best performance and resist life that the material be stored at room temperature.

Can I use SU-8 Developer or PGMEA with SQ?
Yes, you can use it. KemLab cannot guarantee the optimum performance of the resist with these other developers.

How do I remove SQ?
SQ is a permanent resist and very difficult to remove after cross-linking. However, it can be removed using plasma etching, laser ablation, etc.

Is there a double coat process recommendation for larger thicknesses?
Yes. See the dedicated guide here.

Your Question Answered

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Darwin Microfluidics being based in France, ships orders under Delivered At Place (DAP) incoterms. This means that for customers outside the European Union (EU), you are responsible for any applicable customs fees, duties, and taxes in addition to the shipping costs. These charges are determined by your local customs authority and must be paid by you upon the arrival of the shipment in your country.

We recommend contacting your local customs office for detailed information on these charges if you're ordering from outside the EU, as they can vary depending on the destination and the value of your order. Please note that these additional costs are not included in the shipping fees charged by Darwin Microfluidics.

If you've received your order from Darwin Microfluidics and found that a product is defective or missing, please follow these steps to resolve the issue:

Report immediately: Contact our customer service team as soon as possible. Reporting the issue promptly helps us address your concern more efficiently.

Provide details: When you contact us, please provide your order number, the name the order was placed under, and a detailed description of the issue. For defective products, include clear photos or a video that shows the defect.

Review: Our team will review your claim to determine the best course of action. We may ask for additional information or details about the problem.

Resolution: Depending on the situation, we may send a replacement for the defective or missing item, provide a refund, or offer another satisfactory resolution. Our goal is to ensure you are completely satisfied with your purchase.

Follow-up: We will keep you updated throughout the process and confirm when the issue has been resolved to your satisfaction.

We apologize for any inconvenience caused by a defective or missing item and are committed to resolving your issue as quickly and smoothly as possible.

At Darwin Microfluidics, our goal is to offer the most competitive prices directly as our list price, ensuring that all our customers receive great value without needing to navigate complex discount structures. Here’s a detailed look at our discount policy:

Competitive list prices: We work hard to ensure our list prices are among the most competitive in the market. This approach allows us to offer fair pricing to all our customers from the start, eliminating the need for frequent discounts.

Quantity-based discounts: For certain products, we offer quantity-based discounts directly on the product pages. These discounts are automatically applied based on the quantity of the product you purchase, providing savings for bulk purchases without the need for special codes or negotiations.

Bulk orders: While we strive to offer the best prices upfront, we understand that customers making large-scale purchases may have special considerations. In such cases, we invite you to discuss your needs with our sales team. Depending on the size and nature of your order, we may be able to offer tailored discounts or pricing adjustments.

We believe in transparency and simplicity in pricing, allowing you to make your purchases with confidence, knowing you're receiving a fair deal without the hassle of negotiating discounts. If you have any questions about pricing or discounts for bulk orders, please don't hesitate to reach out to our sales team for personalized assistance.

Please follow our returns & refund page.

Since Darwin Microfluidics sells exclusively to companies and institutions and is based in France, the VAT treatment for your orders depends on the location of your company or institution:

Within the EU (excluding France): For customers in other EU countries, the reverse charge mechanism applies. This means that VAT is not charged by us at the point of sale. Instead, it is your responsibility to account for the VAT at the standard rate applicable in your country under the reverse charge procedure. This process helps simplify cross-border transactions within the EU.

In France: For customers located in France, standard French VAT rates apply to all purchases. As a France-based company, we are required to charge VAT on sales to other French companies and institutions, which you can then reclaim according to local VAT procedures if applicable.

Outside the EU: For customers outside the European Union, sales are not subject to VAT by us. However, you may be subject to import duties, taxes, and charges that are not included in the item price or shipping cost. These charges are the buyer's responsibility and vary by country. We advise checking with your local customs office for more information.

Please ensure your VAT identification number is provided during the ordering process for EU transactions to qualify for the reverse charge mechanism. If you have any questions regarding VAT charges or need further assistance with VAT-related issues, please contact our customer service team.

We are unable to provide specific estimates for customs fees, duties, or taxes associated with your order. These charges are determined by the customs authority in your country and can vary based on a variety of factors, including the type of items purchased, their value, and the country to which they are being shipped.

We recommend contacting your local customs office directly to get the most accurate and up-to-date information regarding potential customs charges for your order. They can provide you with detailed guidelines on the fees you might expect to pay based on the products you're importing from us.

Please remember, these charges are the responsibility of the recipient and are not included in the shipping costs paid to Darwin Microfluidics.

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25 options for this product

SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80002-SA
SQ-2
100 mL
129.50€
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SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80002-05
SQ-2
500 mL
611.40€
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SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80002-10
SQ-2
1 L
887.60€
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SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80002-40
SQ-2
4 L
2,662.80€
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SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80002-CS
SQ-2
16 L (4 x 4 L)
9,584.80€
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SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80005-SA
SQ-5
100 mL
139.00€
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SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80005-05
SQ-5
500 mL
626.70€
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SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80005-10
SQ-5
1 L
910.50€
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SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80005-40
SQ-5
4 L
2,733.30€
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SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80005-CS
SQ-5
16 L (4 x 4 L)
9,836.20€
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SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80010-SA
SQ-10
100 mL
146.70€
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SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80010-05
SQ-10
500 mL
641.90€
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SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80010-10
SQ-10
1 L
933.30€
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SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80010-40
SQ-10
4 L
2,801.90€
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SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80010-CS
SQ-10
16 L (4 x 4 L)
10,089.50€
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SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80025-SA
SQ-25
100 mL
156.20€
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SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80025-05
SQ-25
500 mL
660.90€
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SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80025-10
SQ-25
1 L
958.00€
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SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80025-40
SQ-25
4 L
2,874.20€
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SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80025-CS
SQ-25
16 L (4 x 4 L)
10,348.60€
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SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80050-SA
SQ-50
100 mL
173.40€
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SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80050-05
SQ-50
500 mL
721.90€
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SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80050-10
SQ-50
1 L
1,047.60€
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SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80050-40
SQ-50
4 L
3,139.10€
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SQ Negative Epoxy Photoresist for Microfluidics
SQ Negative Epoxy Photoresist for Microfluidics
SKU: KM-SQ80050-CS
SQ-50
16 L (4 x 4 L)
11,301.00€
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