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Mask Aligner Systems

We use these mask aligners to pattern SU-8 and other photoresists when building high-resolution, multi-layer microfluidic masters. They give you a collimated 365 nm UV-LED light source with alignment accuracy down to 1 µm, which is essential when stacking complex channel networks on standard 4-inch or 6-inch wafers without a full cleanroom.

These systems are great for benchtop prototyping, but keep in mind that manually aligning multiple layers requires a steady hand, and extremely thick resist layers can still suffer from slight thermal expansion during long exposures. If you need help matching a substrate chuck to your wafers or optimizing your exposure doses, just let me know.

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2 Results
  • KLOE UV-KUB-2 masking system front view
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    KLOE

    UV-KUB 2 - UV-LED Masking System
    A cutting-edge easy-to-use UV-LED masking system tailored for microfluidics and photolithography, offering unparalleled resolution down to 2 µm. General The UV-KUB 2 is the first UV-LED masking system available internationally, setting a new...
    15,500.00€ - 26,500.00€
  • Soft-lithography UV System with Alignment for SU-8 Mold - Darwin Microfluidics

    KLOE

    UV-KUB 3 Compact High-Precision UV-LED Mask Aligner
    The UV-KUB 3 is a next-generation compact mask aligner featuring a collimated UV-LED light source, delivering sub-micron resolution (<1 µm) and uniform exposure without requiring a cleanroom. Designed for substrates up to 6” and photomasks...
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